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Volumn 3, Issue , 1999, Pages 2611-2616
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Integrated control of microactuators and integrated circuits: a new turning approach in MEMS technology
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
CONTROL SYSTEM ANALYSIS;
CONTROL SYSTEM SYNTHESIS;
ELECTRON DEVICE MANUFACTURE;
FLIP CHIP DEVICES;
INTEGRATED CIRCUIT MANUFACTURE;
INTEGRATED CONTROL;
MICROACTUATORS;
MICROELECTROMECHANICAL DEVICES;
OPTIMIZATION;
PROCESS CONTROL;
VLSI CIRCUITS;
MICROELECTROMECHANICAL SYSTEMS;
NONLINEAR CONTROL SYSTEMS;
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EID: 0033325176
PISSN: 01912216
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (4)
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References (2)
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