Pulsed ion source by non metal shunting arc discharge

Proceedings of the International Conference on Ion Implantation Technology

Volumn 1, Issue , 1999, Pages 381-384

  Yukimura, Ken ^a   Masamune, Sadao ^a   Isono, Ryota ^a   Monguchi, Toshihide ^a   Yoshioka, Kenji ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; ELECTRIC ARCS; ION BEAMS; ION SOURCES; SPECTROSCOPIC ANALYSIS;

NONMETAL SHUNTING ARC DISCHARGE; PULSED ION SOURCES;

ION IMPLANTATION;

EID: 0033323291     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)