Beam parallelism in the 8250 medium current implanter

Proceedings of the International Conference on Ion Implantation Technology

Volumn 1, Issue , 1999, Pages 392-395

  Rathmell, Robert D ^a   Kamenitsa, Dennis E ^a   King, Monty L ^a   Ray, Andrew M ^a  

^a EATON CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ION BEAMS;

BEAM PARALLELISM; ELECTROSTATIC SCANNING;

ION IMPLANTATION;

EID: 0033323054     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)