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Volumn 3822, Issue , 1999, Pages 83-89
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Comparative analysis of silicon wafers micromachining versus nonconventional technology
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Author keywords
[No Author keywords available]
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Indexed keywords
INTEGRATED CIRCUIT MANUFACTURE;
LASER BEAM CUTTING;
MICROELECTROMECHANICAL DEVICES;
PHOTOLITHOGRAPHY;
SILICON WAFERS;
THIN FILMS;
VLSI CIRCUITS;
LASER PATTERNING;
MICROMACHINING;
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EID: 0033322896
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (2)
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References (0)
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