Modification of metals and hard coatings using vacuum-arc metal ion implantation

Proceedings of the International Conference on Ion Implantation Technology

Volumn 2, Issue , 1999, Pages 873-876

  Sharkeev, Yurii P ^a   Gritsenko, Boris P ^a   Fortuna, Sergei V ^a   Perry, Anthony J ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC COATINGS; CHEMICAL VAPOR DEPOSITION; DEFECTS; RESIDUAL STRESSES; TITANIUM NITRIDE;

PHYSICAL VAPOR DEPOSITION (PVD); VACUUM-ARC METAL ION IMPLANTATION;

ION IMPLANTATION;

EID: 0033322403     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)