Investigation of relative sputtering yields during ionoluminescence of Si

Applied Surface Science

Volumn 150, Issue 1, 1999, Pages 107-114

  Bhattacharyya, S R ^a   Brinkmann, U ^a   Hippler, R ^a  

^a BIELEFELD UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; ELECTRON ENERGY LEVELS; ION BOMBARDMENT; LIGHT EMISSION; LUMINESCENCE; NEON; OXYGEN; POSITIVE IONS; SINGLE CRYSTALS; SPUTTERING; SULFUR COMPOUNDS; XENON;

ATOMIC LINE EMISSIONS; COLLISION CASCADES; IONOLUMINESCENCE; RADIATIVE DE EXCITATION; SPUTTERING YIELDS;

SILICON;

EID: 0033322054     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00229-9     Document Type: Article

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