Thin film transistors fabricated in printed silicon

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 10 A, 1999, Pages

  Toet, Daniel ^a   Thompson, Michael O ^a   Smith, Patrick M ^a   Carey, Paul G ^a   Sigmon, Thomas W ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; AMORPHOUS SILICON; ANNEALING; ATOMIC FORCE MICROSCOPY; ION IMPLANTATION; LASER PULSES; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

HYDROGEN EFFUSION; LASER-INDUCED MATERIAL TRANSFER;

THIN FILM TRANSISTORS;

EID: 0033321703     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l1149     Document Type: Article

References (9)