Laser ablation and microstructuring of Si-containing polycarbonates and polyestercarbonates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3822, Issue , 1999, Pages 146-154

  Wei, J ^a   Stebani, J ^a   Kunz, Th ^a   Hahn, Ch ^a   Lippert, T ^a   Wokaun, A ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

LASER PULSES; MICROSTRUCTURE; PASSIVATION; PLASTIC FILMS; POLYCARBONATES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICA; SYNTHESIS (CHEMICAL); THIN FILMS;

POLYESTERCARBONATES;

LASER ABLATION;

EID: 0033321208     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)