Co-axial multicusp source for low axial energy spread ion beam production

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 433, Issue 3, 1999, Pages 579-586

  Lee, Y ^a   Gough, R A ^a   Leung, K N ^a   Vujic, J ^a,b   Williams, M D ^a   Zahir, N ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Etcheverry Hall MCI 730   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LEVELS; ELECTRONS; ION BEAM LITHOGRAPHY; ION BEAMS; LIGHT EMISSION; MAGNETIC FILTERS; PLASMAS; TEMPERATURE;

ELECTRON TEMPERATURE; ENERGY SPREAD; MULTICUSP ION SOURCE; PLASMA POTENTIAL DISTRIBUTION; RADIOACTIVE ION BEAM; TRANSVERSE ION ENERGY;

ION SOURCES;

EID: 0033320825     PISSN: 01689002     EISSN: None     Source Type: None    
DOI: 10.1016/S0168-9002(99)00274-0     Document Type: Article

References (9)

1. W. Finkelstein, A. Mondelli, Semiconductor Int. 6 (1995) 107.
2. G.H. Mackenzie, M. Dombsky, W.R. Rawnsley, G. Stanford, Y. Yin, Proceedings of the 14th International Conference on Cyclotron and its Applications, Cape Town, South Africa, 1995.
3. Y. Ueda, T. Yoshikawa, Y. Ito, M. Nishikawa, S. Goto, Proceedings of the Sixth International Conference on Ion Sources, Whistler, BC, Canada, 1995.
4. T. Vilaithong, S. Singkarat, W. Pairsuwan, J.F. Krai, D. Boonyawan, D. Suwannakachorn, S. Konklong, P. Kanjanarat, G.G. Hoyes, Proceedings of the International Conference at the Forschungszentrum Julich, 13-17 May 1991.
5. Y. Lee, Ph.D. Thesis, University of California, Berkeley, May 1998.
6. Y. Lee, L.T. Perkins, R.A. Gough, M. Hoffmann, W.B. Kunkel, K.N. Leung, M. Sarstedt, J. Vujic, M. Weber, M.D. Williams, Nucl. Instr. and Meth. A 374 (1996) 1.
7. P.W. Allison, J.D. Sherman, D.V. Holtkamp, IEEE Trans. Nucl. Sci. NS-30 (1983) 2204.
8. Y. Lee, R.A. Gough, W.B. Kunkel, K.N. Leung, J. Vujic, M.D. Williams, D. Wutte, F.L. Yang, Microelectron. Eng. 41/42 (1998) 241-244.
9. K.N. Leung, P. Herz, W.B. Kunkel, Y. Lee, L. Perkins, D. Pickard, M. Sarstedt, M. Weber, M.D. Williams, J. Vac. Sci. Technol. B 13 (6) (1995) 2600.