Glow discharge optical spectroscopy depth profile analysis of conductive and nonconductive samples in a commercial service laboratory

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 310-312

  Asam, T ^a  

^a Starnberger Straße 13   (Germany)

Author keywords

Depth profile analysis; Depth resolution; Determination of CVD and PVD layers; Glow discharge spectrometry

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONDUCTIVE FILMS; GLOW DISCHARGES; SPECTROMETRY;

GLOW DISCHARGE SPECTROMETRY; PHYSICAL VAPOR DEPOSITION (PVD);

COATINGS;

EID: 0033320259     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00231-5     Document Type: Article

References (2)

1. Grimm W. Eine neue Glimmentladungslampe für die optische Emissionsspecktralanalyse. Spectrochim. Acta B. 23:1968;443.
2. Bengtson A. Quantitative depth profile analysis by glow discharge. Spectrochim. Acta. 1994;411-429.