Humidity microsensor in CMOS Mitel15 technology

Canadian Conference on Electrical and Computer Engineering

Volumn 3, Issue , 1999, Pages 1652-1657

  Stiharu, I ^a   Rakheja, S ^a   Wang, L ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC HUMIDITY; CHARACTERIZATION; CMOS INTEGRATED CIRCUITS; DEPOSITION; FIELD EFFECT TRANSISTORS; FILMS; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; ION SENSITIVE FIELD EFFECT TRANSISTORS;

CMOS TECHNOLOGY; MICROSENSOR FABRICATION; POLYANILINE LAYER; RELATIVE HUMIDITY MICROSENSOR;

MICROSENSORS;

EID: 0033319830     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)