W-coating for MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 150-157

  Mani, S S ^a   Fleming, J G ^a   Sniegowski, J J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FRICTION; MICROACTUATORS; STICTION; SUBSTRATES; SURFACES; THIN FILMS; TUNGSTEN;

HARD COATING; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033319806     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)