Miniaturized time-scanning fourier transform spectrometer based on silicon technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 39-47

  Manzardo, Omar ^a   Herzig, Hans Peter ^a   Marxer, Cornel R ^a   de Rooij, Nico F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ELECTROSTATIC DEVICES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFEROMETERS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; MIRRORS; OPTICAL RESOLVING POWER; SCANNING; SEMICONDUCTING SILICON;

ELECTROSTATIC COMB DRIVE ACTUATOR; FOURIER TRANSFORM SPECTROMETER; MICHELSON INTERFEROMETER; OPTICAL PATH DIFFERENCE; PHASE CORRECTION;

SPECTROMETERS;

EID: 0033319787     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)