Calibration procedures for a two-modulator generalized ellipsometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3754, Issue , 1999, Pages 150-160

  Jellison Jr , Gerald E ^a   Modine, Frank A ^a   Chen, Chi ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIREFRINGENCE; CRYSTALS; DIFFRACTION GRATINGS; LIGHT MODULATION; LIGHT MODULATORS; LIGHT POLARIZATION; LIGHT REFLECTION; OPTICAL INSTRUMENT LENSES; OPTICAL PROPERTIES; PHOTOELASTICITY; THIN FILMS;

CROSS POLARIZATION; GENERALIZED ELLIPSOMETRY; JONES MATRIX; MUELLER MATRIX; PHOTOELASTIC MODULATOR; POLARIZATION STATE DETECTOR; POLARIZATION STATE GENERATOR; UNIAXIAL MATERIALS;

ELLIPSOMETRY;

EID: 0033319748     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)