Fabrication and properties of refractive micro optical beam shaping elements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3879, Issue , 1999, Pages 20-31

  Kley, E Bernhard ^a   Wittig, Lars Chr ^a   Cumme, Matthias ^a   Zeitner, Uwe D ^a   Dannberg, Peter ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; LITHOGRAPHY; OPTICAL DEVICES; OPTICAL GLASS; POLYMERS; REFRACTIVE INDEX;

ANALOGUE LITHOGRAPHY; BEAM SHAPING ELEMENT;

MICROOPTICS;

EID: 0033319304     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)