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Volumn 3780, Issue , 1999, Pages 56-65
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Integrating geometrical and physical optics with the lensgroup operator method
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SOFTWARE;
ELECTROMAGNETIC WAVE DIFFRACTION;
EXCIMER LASERS;
FOURIER OPTICS;
GEOMETRICAL OPTICS;
LIGHT PROPAGATION;
NONLINEAR OPTICS;
RAY TRACING;
BEAM RESHAPING SYSTEM;
CLIPPED EXCIMER BEAM;
LENSGROUP OPERATOR METHOD;
RAY BASED METHODS;
PHYSICAL OPTICS;
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EID: 0033318594
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (13)
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