Micro stereo lithography and fabrication of 3D micro devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3879, Issue , 1999, Pages 116-123

  Varadan, Vijay K ^a   Varadan, Vasundara V ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MIRRORS; OPTICAL FIBERS; OPTICAL INSTRUMENT LENSES; SEMICONDUCTING POLYMERS; THREE DIMENSIONAL; TRANSISTORS;

MICRO STEREO LITHOGRAPHY; MICROFABRICATION;

LITHOGRAPHY;

EID: 0033318315     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)