Preparation of photoreactive zirconium precursor stabilized by aromatic diethanolamines and its application for fine patterning

Journal of the Ceramic Society of Japan

Volumn 107, Issue 8, 1999, Pages 772-774

  Kikuta, Koichi ^a   Fukaya, Atsushi ^a   Takagi, Katsuhiko ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Alkanolamine; N phenyldiethanolamine; Patterning; Photoreaction; Sol gel; Zirconia

Indexed keywords

AMINES; AROMATIC COMPOUNDS; CERAMIC MATERIALS; CHEMICAL MODIFICATION; LIGHT ABSORPTION; PHOTOCHEMICAL REACTIONS; PHOTOLITHOGRAPHY; SOL-GELS; ULTRAVIOLET RADIATION;

PHENYLDIETHANOLAMINE; PHOTOREACTIVITY; ZIRCONIUM ISOPROPOXIDE;

ZIRCONIA;

EID: 0033318178     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.107.772     Document Type: Article

References (8)

1. K. Kikuta, K. Takagi and S. Hirano, J. Am. Ceramic Soc. in press.
2. K. Kikuta and S. Hirano, "Ceramic Transactions," Vol. 83, Am. Ceram. Soc. (1998) pp. 307-13.
3. K. Shinmou, N. Tohge and T. Minami, Jpn. J. Appl. Phys., 33, L1181-84 (1994).
4. N. Tohge, Kobunshi, 44[4], 236-37 (1995) [in Japanese].
5. Y. Takahashi and Y. Matsuoka, J. Mater. Sci., 23, 2259-66 (1988).
6. Y. Takahashi, Y. Matsuoka, K. Yamaguchi, M. Matsuki and K. Kobayashi, J. Mater. Sci., 25, 3960-64 (1990).
7. D. C. Bradley, R. C. Mehrotra and D. P. Gaur, "Metal Alkoxides," Academic Press (1978).
8. S.H. Pine, "Organic Chemistry," 5th ed., McGraw Hill Text (1987).