Usage of polarization for high-accuracy micro-metrology sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3897, Issue , 1999, Pages 424-435

  Totzeck, M ^a   Jacobsen, H ^a   Tiziani, H J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTROMAGNETIC FIELD EFFECTS; INTERFEROMETRY; LIGHT INTERFERENCE; LIGHT POLARIZATION; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; OPTICAL SENSORS; PHYSICAL OPTICS;

MICROMETROLOGY SENSORS; POLARIZATION MICROSCOPY;

OPTICAL MICROSCOPY;

EID: 0033316556     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)