Nanoscale patterning of Au films on Si surfaces by atomic force microscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 A, 1999, Pages 6952-6954

  Moon, Won Chul ^a   Yoshinobu, Tatsuo ^a   Iwasaki, Hiroshi ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

AFM; Anodic oxidation; Au film; Chemical etching; Patterning; Silicon

Indexed keywords

ANODIC OXIDATION; DEPOSITION; ETCHING; GOLD; NANOTECHNOLOGY; SILICA; SILICON; SURFACES; THIN FILMS;

GOLD FILM; NANOSCALE PATTERNING;

ATOMIC FORCE MICROSCOPY;

EID: 0033316467     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.6952     Document Type: Article

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