pH response of a-Si:H ISFET

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3897, Issue , 1999, Pages 758-766

  Chou, Jung Chuan ^a   Lin, Jin Sung ^a  

^a NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CURRENT VOLTAGE CHARACTERISTICS; HYDROGENATION; HYSTERESIS; ION SENSITIVE FIELD EFFECT TRANSISTORS; SEMICONDUCTOR DEVICE MANUFACTURE;

HYDROGENATED AMORPHOUS SILICON;

PH SENSORS;

EID: 0033315365     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)