Micropattern fabrication by specially designed micro tool

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 365-372

  Aoki, Ismau ^a   Takahashi, Toshinori ^a  

^a KANAGAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CUTTING TOOLS; FABRICATION; MACHINE COMPONENTS; METAL CUTTING; MILLING CUTTERS; THREE DIMENSIONAL;

MICROMILL; MICROPATTERN FABRICATION;

MICROMACHINING;

EID: 0033315336     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)