Pulsed laser deposited coatings for stiction and wear reduction in MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 76-84

  Pelt, J S ^a   Ramsey, M E ^a   Magana Jr , R ^a   Poindexter Jr , E ^a   de Boer, M P ^a   LaVan, D A ^a   Dugger, M T ^a   Smith, J H ^a   Durbin, S M ^a  

^a FLORIDA A AND M UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT ANGLE; DEPOSITION; DIELECTRIC MATERIALS; HARDNESS; MICROELECTROMECHANICAL DEVICES; NITRIDES; PROTECTIVE COATINGS; SILICON CARBIDE; SINGLE CRYSTALS; STICTION; THIN FILMS; WEAR RESISTANCE;

CARBON NITRIDE; HYDROPHOBIC COATINGS; METALLIC OXIDES; NANOINDENTATION; PULSED LASER DEPOSITED COATINGS; VACUUM DEPOSITION; WEAR REDUCTION;

PULSED LASER APPLICATIONS;

EID: 0033315332     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)