3C(β)-SiC-on insulator waveguide structures for modulators and sensor systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3896, Issue , 1999, Pages 352-359

  Vonsovici, Adrian ^a   Reed, Graham T ^a   Josey, M ^a   Routley, P ^a   Evans, Alan G R ^a   Namavar, F ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; ION IMPLANTATION; LIGHT MODULATORS; OPTICAL SENSORS; OPTOELECTRONIC DEVICES; SILICON CARBIDE; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

HIGH SPEED MODULATORS; PLANAR WAVEGUIDES; POCKEL MODULATOR; RIB WAVEGUIDES; SILICON BASED OPTOELECTRONICS; SILICON ON INSULATOR;

WAVEGUIDES;

EID: 0033315172     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)