Intra-field gate CD variability and its impact on circuit performance

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1999, Pages 479-482

  Orshansky, Michael ^a   Milor, Linda ^a   Nguyen, Ly ^a   Hill, Gene ^a   Peng, Yeng ^a   Hu, Chenming ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CMOS INTEGRATED CIRCUITS; GATES (TRANSISTOR); MATHEMATICAL MODELS; PERFORMANCE; STATISTICAL METHODS;

CORRECTION ALGORITHM; CRITICAL DIMENSION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0033315074     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)