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Volumn 273-274, Issue , 1999, Pages 603-607
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Deep state defects in strained and relaxed epitaxial Si1 - XGex on Si introduced by 3d transition metal and 5d noble metal impurities
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Author keywords
Band offsets; Deep state defects; Epitaxial Si1 XGex Si; Noble metal impurities; Transition metal impurities
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Indexed keywords
ACTIVATION ENERGY;
CRYSTAL DEFECTS;
CRYSTAL IMPURITIES;
EPITAXIAL GROWTH;
PRECIOUS METALS;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
STRAIN;
TRANSITION METALS;
DEEP STATE DEFECTS;
HETEROJUNCTION BIPOLAR TRANSISTORS;
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EID: 0033314723
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-4526(99)00584-0 Document Type: Article |
Times cited : (11)
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References (9)
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