High performance 60-V class lateral power MOSFET on thin film SOI with a graded doping profile in the drift region

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 1999, Pages 123-126

  Cao, G ^a   De Souza, M M ^a   Sankara Narayanan, E M ^a  

^a DE MONTFORT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC BREAKDOWN OF SOLIDS; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; SILICON ON INSULATOR TECHNOLOGY; THIN FILMS;

DRIFT REGIONS; GRADED DOPING PROFILES;

MOSFET DEVICES;

EID: 0033313275     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)