Formation of complex clusters in Ar/O2 gas cluster beams

Proceedings of the International Conference on Ion Implantation Technology

Volumn 2, Issue , 1999, Pages 1226-1229

  Saito, Masahiro ^a   Hagiwara, Norihisa ^a   Toyoda, Noriaki ^a   Matsuo, Jiro ^a   Yamada, Isao ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ETCHING; OXYGEN; VAN DER WAALS FORCES;

REACTIVE CLUSTER ION BEAMS; TIME OF FLIGHT (TOF) MASS ANALYZERS;

ION BEAMS;

EID: 0033311974     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)