Formation of diamond like carbon films by plasma source ion implantation from CH4, C2H2 and C6H6

Proceedings of the International Conference on Ion Implantation Technology

Volumn 2, Issue , 1999, Pages 1214-1217

  Baba, Koumei ^a   Hatada, Ruriko ^a   Nakao, Setsuo ^a   Miyagawa, Soji ^a   Miyagawa, Yoshiko ^a  

^a Technology Cent of Nagasaki   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; BENZENE; CARBON; FRICTION; GLOW DISCHARGES; HARDNESS; ION IMPLANTATION; METHANE; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE; TOLUENE;

DIAMOND LIKE CARBON FILMS; ELASTIC RECOIL DISPERSION ANALYSIS (ERDA);

AMORPHOUS FILMS;

EID: 0033311973     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)