Rapid Thermal Processing of PZT thin films using a new triol based sol-gel route

Ferroelectrics

Volumn 228, Issue 1-4, 1999, Pages 61-78

  Arscott, S ^a   Miles, R E ^a   Milne, S J ^a  

^a UNIVERSITY OF LEEDS   (United Kingdom)

Author keywords

PZT; Rapid thermal processing; Sol gel; Thin film

Indexed keywords

COERCIVE FORCE; DIELECTRIC FILMS; HIGH TEMPERATURE EFFECTS; LEAD COMPOUNDS; PARAFFINS; PERMITTIVITY; RAPID THERMAL ANNEALING; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; SOL-GELS; THIN FILMS;

LEAD ZIRCONATE TITANATE; REMANENT POLARIZATION; TRIS HYDROXYMETHYLETHANE;

FERROELECTRIC MATERIALS;

EID: 0033311799     PISSN: 00150193     EISSN: None     Source Type: Journal    
DOI: 10.1080/00150199908226126     Document Type: Article

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