Interprocess run-to-run feedforward control for wafer patterning

IEEE Conference on Control Applications - Proceedings

Volumn 1, Issue , 1999, Pages 789-795

  Wagner, Aaron B ^a   Ruegsegger, Steven M ^a   Freudenberg, James S ^a   Grimard, Dennis S ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL SYSTEM ANALYSIS; CONTROL SYSTEM SYNTHESIS; MATHEMATICAL MODELS; MEASUREMENT ERRORS; PHOTORESISTS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

FEEDFORWARD CONTROL SYSTEMS; MEAN SQUARE ERROR ESTIMATIONS; WAFER PATTERNING;

PROCESS CONTROL;

EID: 0033311636     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)