Optical emission spectrum analyses during pulsed laser deflash of integrated circuit packages

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 12 A, 1999, Pages 6750-6753

  Hong, Min Hui ^a   Lu, Yong Feng ^a   Chen, Qiong ^b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b Advanced System Automation   (Singapore)

Author keywords

IC packages; Optical emission spectrum; Plasma analysis; Pulsed laser deflash

Indexed keywords

ELECTRONICS PACKAGING; INTEGRATED CIRCUITS; LIGHT SOURCES; OPTICAL BEAM SPLITTERS; OPTICAL FIBERS; OPTICAL INSTRUMENT LENSES; PLASMAS; SOLID STATE LASERS; SPECTRUM ANALYSIS;

PLASMA ANALYSIS; PULSED LASER DEFLASH;

PULSED LASER APPLICATIONS;

EID: 0033310530     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.6750     Document Type: Article

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