Ion beam sputter deposition of TiNi shape memory alloy thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 165-172

  Davies, S T ^a   Tsuchiya, K ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; SPECIFIC HEAT; SPUTTER DEPOSITION; THERMAL CONDUCTIVITY; THIN FILMS; TITANIUM NITRIDE;

ION BEAM SPUTTER DEPOSITION; KAUFMAN TYPE ION SOURCE;

SHAPE MEMORY EFFECT;

EID: 0033310397     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)