Micro-optical structures for atom lithography studies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3892, Issue , 1999, Pages 266-273

  Harvey, E C ^a   Mackin, T R ^a   Dempster, B C ^a   Scholten, R E ^a  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM LITHOGRAPHY; MICROOPTICAL STRUCTURES;

EXCIMER LASERS; LASER ABLATION; LIGHT MODULATION; MASKS; PHOTOLITHOGRAPHY; QUARTZ; TRANSMISSION ELECTRON MICROSCOPY;

MICROOPTICS;

EID: 0033309966     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)