Economic fabrication of microscale features in thick resists using scanning projection lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3874, Issue , 1999, Pages 305-311

  Kilgo III, Marvin M ^a   Williams, Chuck ^a   Constantinide, Dan ^a  

^a Tamarack Scientific Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; ECONOMICS; LITHOGRAPHY; PHOTORESISTS; PRODUCT DEVELOPMENT; SEMICONDUCTOR DEVICE MANUFACTURE; THICK FILMS; THICKNESS MEASUREMENT;

MICROFLUIDIC; SCANNING PROJECTION LITHOGRAPHY; THICK DRY FILM RESISTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033309896     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)