Review of the history and technology of micromachined miniature displays using foundry produced silicon backplanes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3891, Issue , 1999, Pages 26-38

  Walton, A J ^a   Vass, D G ^a   Underwood, I ^a   Bodammer, G ^a   Calton, D W ^a   Seunarine, K ^a   Stevenson, J T M ^a   Gundlach, A M ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS PACKAGING; LIGHT MODULATORS; MICROMACHINING; MIRRORS; CHEMICAL POLISHING; CMOS INTEGRATED CIRCUITS; LIGHT MODULATION; MICROPROCESSOR CHIPS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; FERROELECTRIC MATERIALS; SURFACE ROUGHNESS;

MICRODISPLAYS; CHEMICAL MECHANICAL POLISHING (CMP); LIQUID CRYSTAL CELL FILLING; FERROELECTRIC LIQUID CRYSTALS (FLC); MICROMACHINED MINIATURE DISPLAYS;

LIQUID CRYSTAL DISPLAYS;

EID: 0033307876     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (29)