Vacuum deposition of parylene films: influence of process factors and baffling on film-thickness distribution

Journal of Plastic Film and Sheeting

Volumn 15, Issue 4, 1999, Pages 308-328

  Spellman, Gordon P ^a   Carley, James F ^a,b   Lopez, Lawrence A ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; ELECTRIC INSULATING COATINGS; IONIZATION OF SOLIDS; PLASTIC FILMS; PROTECTIVE COATINGS; THICKNESS MEASUREMENT; VACUUM DEPOSITED COATINGS; VAPORIZATION;

FILM THICKNESS; PARYLENE FILMS; VACUUM DEPOSITION;

THIN FILMS;

EID: 0033299584     PISSN: 87560879     EISSN: None     Source Type: Journal    
DOI: 10.1106/YA78-996T-WE2E-FR71     Document Type: Article

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