Hydrogen transport in phosphorus and boron doped polycrystalline silicon

Materials Research Society Symposium - Proceedings

Volumn 557, Issue , 1999, Pages 305-310

  Nickel, N H ^a   Kaiser, I ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; BORON; DEUTERIUM; DIFFUSION; ELECTRON TRANSPORT PROPERTIES; FERMI LEVEL; HYDROGENATION; MATHEMATICAL MODELS; PHOSPHORUS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTOR DOPING; SUBSTRATES;

HYDROGEN DIFFUSION; POLYCRYSTALLINE SILICON;

SILICON;

EID: 0033298624     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-557-305     Document Type: Article

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