Thermoelectric microsensors and microactuators (MEMS) fabricated by thin film technology and micromachining

International Conference on Thermoelectrics, ICT, Proceedings

Volumn , Issue , 1999, Pages 285-293

  Voelklein, F ^a   Blumers, M ^a   Schmitt, L ^a  

^a RHEINMAIN UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSENSORS; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILM DEVICES; VACUUM APPLICATIONS;

ANISOTROPIC ETCHING; THERMOELECTRIC MICROACTUATORS; THERMOELECTRIC MICROSENSORS;

THERMOELECTRIC EQUIPMENT;

EID: 0033298479     PISSN: 10942734     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)