Study of porous silicon gas sensor

Proceedings of the IEEE Hong Kong Electron Devices Meeting

Volumn , Issue , 1999, Pages 80-83

  Kwok, W M ^a   Bow, Y C ^a   Chan, W Y ^a   Poon, M C ^a   Han, P G ^a   Wong, H ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CHEMICAL SENSORS; CURRENT VOLTAGE CHARACTERISTICS; MIXTURES; OPTICAL MICROSCOPY; ORGANIC COMPOUNDS; POLYCRYSTALLINE MATERIALS; POROUS SILICON; SCHOTTKY BARRIER DIODES; SILICON WAFERS; THICK FILMS; VLSI CIRCUITS;

ALUMINUM FILM; HUMIDITY VAPOR SENSOR; ORGANIC VAPOR SENSOR; PROPANOL;

SILICON SENSORS;

EID: 0033296074     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)