Graded PZT thin film capacitors with stoichimetric variation by MOD technique

Integrated Ferroelectrics

Volumn 24, Issue 1, 1999, Pages 181-188

  Chen, Zheng ^a   Arita, Koji ^b   Lim, Myoungho ^c   Paz De Araujo, Carlos A ^a,c  

^a University of Colorado Colorado Springs   (United States)

^b Panasonic Corporation of North America   (United States)

^c Symetrix Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DECOMPOSITION; HYSTERESIS; LEAD COMPOUNDS; MATHEMATICAL MODELS; POLARIZATION; STOICHIOMETRY; THIN FILMS;

FERROELECTRIC THIN FILM; LEAD ZIRCONATE TITANATE; METAL ORGANIC DECOMPOSITION;

FERROELECTRIC MATERIALS;

EID: 0033295926     PISSN: 10584587     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/10584589908215590     Document Type: Article

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