Piezo - electric AlN and PZT films for micro - electronic applications

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 1999, Pages 1031-1036

  Loebl, H P ^a   Klee, M ^a   Wunnicke, O ^a   Kiewitt, R ^a   Dekker, R ^a   Pelt, E v ^a  

^a PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; ALUMINUM COMPOUNDS; CRYSTAL MICROSTRUCTURE; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE; ELECTROMECHANICAL COUPLING FACTORS; LEAD ZIRCONIUM TITANATE;

PIEZOELECTRIC MATERIALS;

EID: 0033295277     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)