Integrated optical longitudinal strain sensor on a micromachined silicon longitudinal mode transducer

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1999, Pages 467-470

  Lee, Chung Hoon ^a   Lal, Amit ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; DIFFRACTION GRATINGS; OPTICAL SENSORS; PHOTODIODES; STRAIN GAGES; STRAIN MEASUREMENT; ULTRASONIC DEVICES; ULTRASONIC MEASUREMENT;

INTEGRATED OPTICAL LONGITUDINAL STRAIN SENSOR; SILICON LONGITUDINAL MODE TRANSDUCER; SILICON RESONATOR; ULTRASONIC STRAIN;

ACOUSTIC TRANSDUCERS;

EID: 0033295137     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)