SAW tomography - spatially resolved charge detection by SAW in semiconductor structures for imaging applications

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1999, Pages 11-14

  Streibl, M ^a   Beil, F ^a   Wixforth, A ^a   Kadow, C ^a   Gossard, A C ^a  

^a UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ACOUSTIC WAVES; SEMICONDUCTOR DEVICE STRUCTURES; SIGNAL PROCESSING;

ACOUSTIC BEAMS; SPATIALLY RESOLVED CHARGE DETECTION; TAPERED INTERDIGITAL TRANSDUCERS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0033294630     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ultsym.1999.849346     Document Type: Conference Paper

References (9)