Electrical modeling of MEMS sensor for integrated accelerometer applications

Proceedings of the IEEE Hong Kong Electron Devices Meeting

Volumn , Issue , 1999, Pages 88-91

  Lee, W F ^a   Chan, P K ^a   Siek, L ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ACCELEROMETERS; CAPACITANCE; COMPUTER SIMULATION; ELECTROSTATICS; LEAKAGE CURRENTS; MICROELECTROMECHANICAL DEVICES;

CAPACITIVE SENSING; INTEGRATED ACCELEROMETER; MICROELECTROMECHANICAL SYSTEM SENSOR; SENSOR MODELING;

SENSORS;

EID: 0033294468     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)