Development of high quality AlN epitaxial film for 2.4GHz front-end SAW matched filter

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1999, Pages 263-267

  Tomabechi, S ^a   Wada, K ^a   Saigusa, S ^a   Matsuhashi, H ^a   Nakase, H ^a   Masu, K ^a   Tsubouchi, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE FILTERS; CRACK PROPAGATION; CRACKS; DEPOSITION; EPITAXIAL GROWTH; HIGH TEMPERATURE EFFECTS; LASER APPLICATIONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE STRUCTURE; THICK FILMS;

ALUMINUM NITRIDE EPITAXIAL FILM; KNUDSEN PRESSURE; PROPAGATION LOSS; SURFACE ACOUSTIC WAVE MATCHED FILTER;

ALUMINUM COMPOUNDS;

EID: 0033294028     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ultsym.1999.849399     Document Type: Conference Paper

References (5)