Improvement on theoretical model for thin-wire and slot measurement by optical diffraction

Measurement Science and Technology

Volumn 10, Issue 11, 1999, Pages

  Tang, W ^a   Zhou, Y ^a   Zhang, J ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Diameter; Fraunhofer diffraction; Measurement; Optical diffraction; Thin cyclinder; Thin wire; Width of slots

Indexed keywords

DIFFRACTIVE OPTICS; MATHEMATICAL MODELS;

FRAUNHOFER DIFFRACTION; OPTICAL DIFFRACTION;

SIZE DETERMINATION;

EID: 0033293864     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/10/11/401     Document Type: Article

References (5)

1. Born M and Wolf E 1980 Principles of Optics (Oxford: Pergamon)
2. Schmidt S 1976 Ein Beitrag zur Erklaerung der Lichtbeugung am metallischen Kreiszylinder PTB-Mitteilungen 86 239-47
3. Xing X, Li M, Ozono S, Kato J, Bai G, Zheng W and Li C 1987 High accuracy microdimension measurement system by using laser and CCD Measurement 591-4
4. Goodman J 1968 Introduction to Fourier Optics (San Francisco, CA: McGraw-Hill)
5. Luedicke F and Radmacher H J 1989 Bestimmung von Maß und Form an Zilindern PTB-Mitteilungen 6 429-33