Design and fabrication of SiO2/Si3N4 CVD optical waveguides

SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference Proceedings

Volumn 2, Issue , 1999, Pages 454-457

  Bulla, D A P ^a   Borges, B V ^a   Romero, M A ^a   Morimoto, N I ^a   Neto, L G ^a   Cortes, A L ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CLADDING (COATING); INTEGRATED OPTICS; MATHEMATICAL MODELS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAPID THERMAL ANNEALING; SEMICONDUCTING SILICON COMPOUNDS; SILICON SENSORS; SURFACE ROUGHNESS;

LEAKAGE LOSSES; OPTICAL BUFFER LAYER;

OPTICAL WAVEGUIDES;

EID: 0033293518     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)