In situ and real-time monitoring of plasma-induced etching of PET and acrylic films

Plasmas and Polymers

Volumn 4, Issue 4, 1999, Pages 247-258

  Shi, M K ^a   Graff, G L ^a   Gross, M E ^a   Martin, P M ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLICS; CARBON DIOXIDE; CARBON MONOXIDE; CURING; EMISSION SPECTROSCOPY; OXIDATION; PHOTOCHEMICAL REACTIONS; PLASTIC FILMS; POLYETHYLENE TEREPHTHALATES; SURFACE CHEMISTRY; SURFACE PROPERTIES; SURFACE TREATMENT;

ACRYLIC FILMS; OPTICAL EMISSION SPECTROSCOPY; RESIDUAL GAS ANALYSIS;

PLASMA ETCHING;

EID: 0033292185     PISSN: 10840184     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1021875310148     Document Type: Article

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