Multi-level pseudo-random signal design and `model-on-demand' estimation applied to nonlinear identification of a RTP wafer reactor

Proceedings of the American Control Conference

Volumn 3, Issue , 1999, Pages 1573-1577

  Braun, M W ^a   Rivera, D E ^a   Stenman, A ^a   Foslien, W ^a   Hrenya, C ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CONTROL SYSTEM ANALYSIS; CONTROL SYSTEM SYNTHESIS; IDENTIFICATION (CONTROL SYSTEMS); MATHEMATICAL MODELS; RANDOM PROCESSES; SILICON WAFERS; THERMOANALYSIS;

MULTILEVEL PSEUDORANDOM SEQUENCES; RAPID THERMAL PROCESSING (RTP) WAFER REACTORS;

NONLINEAR CONTROL SYSTEMS;

EID: 0033285803     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)